25th GREEN Open Seminar

In this talk, fabrication technique of solid-state thin-film batteries (TFBs) using pulsed laser deposition (PLD) is reported. TFBs are fabricated by depositing layers of cathode, electrolyte and anode. We use several transition metal oxides (LiCoO₂, LiMn₂O₄, and LiCoMnO₄) as a cathode layer. As a solid electrolyte, amorphous lithium phosphate is deposited from ceramic Li₃PO₄ target. Although the oxide electrolytes show lower ionic conductivity than sulfides, the resistance of the electrolyte layer is small enough to operate thin-film batteries. The anode layer is selected by the electrochemical stability of electrolyte. Lithium metal can be used for L-P-O electrolyte.