第92回先端計測オープンセミナー

2017年2月2日(木) 15 : 00~16 : 00

国立研究開発法人 物質・材料研究機構 
千現地区 研究本館8階 中セミナー室
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Prof. Ernst Bauer (Department of Physics, Arizona State University)

Multimethod Analysis with Cathode Lens Electron Microscopy

Cathode lens electron microscopes (CLEM), which are equipped with an energy filter such as the Spin-Polarized Low Energy Electron Microscope (SPLEEM) recently acquired by NIMS, allow today so many complementary analysis methods and experimental facilities that they can be used as a full-fledged surface and thin film analysis laboratories. Little use has been made up to now of this possibility because most instruments are dedicated to specific problems, which require only one or a few of these methods. Only in a few user facilities such as synchrotron radiation centers this potential of CLEM is used presently. These instruments are overbooked and user periods are generally too short for systematic studies. This problem can be overcome to a certain extent in the laboratory with Auger electron spectroscopy and in the near future nearly completely with high intensity laboratory X-ray sources with photon energies up to 500 eV, which are presently in development. The lecture will discuss the present status and – if time allows - speculate about future possibilities.