The 133rd AMCP Open Seminar

Monday, October 29, 2018, 15:00-16:00

National Institute for Materials Science (NIMS)
Sengen Main Bldg. 8F Middle Seminar Room→ access

Pre-registration is not required.
For inquiries, please contact the Administrative Office.
This lecture is open to the public. Your participation is strongly encouraged.

SAKAI Chikako, NIMS Postdoctoral Researcher (GREEN, Nano Interface Characterization Group) 

Electrical Potential Distribution Imaging using Helium Ion Microscopy

Helium ion microscopy is an imaging technique developed by Ward et al. in 2006. Helium ion microscope (HIM) has high spatial resolution (on the nanometer scale) and high observation ability of the materials with a low conductivity. Electrical potential distribution imaging is a direct method for observing active sites in devices. With the aim of developing a potential distribution measurement technique with high spatial resolution, we observed a secondary electron (SE) images of the cross-sectional surfaces of a multilayer ceramic capacitor (MLCC) with voltages applied to the internal electrodes of the MLCC using HIM. Contrast corresponding to different electrical potentials was observed in SE images. Development of new electrical potential distribution measurement technique was done [1, 2]. In addition to the above, I will present the researches that I have done at National Institute for Materials Science for about 4 years.


[1] C. Sakai et al., Appl. Phys. Lett. 109 (2016) 051603.
[2] C. Sakai et al., J. Vac. Sci. Technol. B 36 (2018) 042903.